Observation of film growth phenomena using micromachined structures

Materials Research Society Symposium - Proceedings

Volumn 441, Issue , 1997, Pages 69-74

  DiMeo Jr , F ^a   Cavicchi, R E ^a   Semancik, S ^a   Suehle, J S ^a   Tea, N H ^a   Kelliher, J T ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MICROMACHINING; SEMICONDUCTOR MATERIALS; SILICON WAFERS; TEMPERATURE CONTROL; THIN FILMS;

MICROHOTPLATES; MICROMACHINED STRUCTURES;

FILM GROWTH;

EID: 0030721366     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)