Study on the metal induced lateral crystallization behavior of amorphous silicon thin films

Materials Research Society Symposium - Proceedings

Volumn 441, Issue , 1997, Pages 101-106

  Lee, Byung Il ^a   Kim, Kwang Ho ^a   Jeong, Won Cheol ^a   Ahn, Pyung Su ^a   Shin, Jin Wook ^a   Joo, Seung Ki ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; COMPOSITION EFFECTS; CRYSTALLIZATION; NICKEL; PALLADIUM; SILICON COMPOUNDS; STRESS ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY;

METAL INDUCED LATERAL CRYSTALLIZATION (MILC); SILICIDES;

AMORPHOUS FILMS;

EID: 0030721106     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)