On-mirror surfaces obtained with and without polishing

CIRP Annals - Manufacturing Technology

Volumn 46, Issue 1, 1997, Pages

  Venkatesh, V C ^a   Fang, F ^a   Chee, W K ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Mirror surfaces; Scratching; Ultra precision machining

Indexed keywords

ATOMIC FORCE MICROSCOPY; GRINDING (MACHINING); OPTICAL VARIABLES MEASUREMENT; POLISHING; SCANNING ELECTRON MICROSCOPY; TURNING;

ON-MIRROR SURFACES; SCRATCHING; ULTRAPRECISION MACHINING;

SURFACE TREATMENT;

EID: 0030720165     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0007-8506(07)60876-2     Document Type: Article

References (12)

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2. De Chiffre, L., Hansen, H.N., & Bronstein,A.,1996, Investigation on the surface topography in polishing using atomic force microscopy, Ibid, pp. 523-528.
3. Ohmori, H., & Nakagawa,T., 1995 Analysis of mirror surface generation of hard and brittle materials by ELID grinding with superfine grain metallic bond wheels, Annals of the CIRP, Volume 44/1, pp. 287-290.
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6. Namba, Y., & Abe, M., 1993, Ultra-precision grinding of optical glass to produce supersmooth surfaces, Annals of the CIRP, Volume 42/1, pp. 417-420.
7. Venkatesh, V. C., Inasaki, I., Tonshoff, H. K., Nakagawa, T., Marinescu, I.D., 1995, Observations on polishing and ultra-precision machining of semiconductor substrate materials, Annals of the CIRP, Volume 44/2, pp. 611-618.
8. Blackley, S., & Scattergood, R.N., 1991, Ductile regime model for diamond turning of brittle materials, Journal of Precision Engineering, Vol. 13/2, 95-102.
9. Zhong, Z.,Venkatesh, V.C.,Generation of Parabolic and Toroidal Surfaces on Silicon and Silicon-Based Compounds Using Diamond Cup Grinding Wheels,CIRP Annals - Manufacturing Technology, 43(1), 323-326, 1994
10. Yu, H., Terashima, S., Morita, N., & Yoshida, Y., 1996, Cryogenic grinding of brittle materials, Proc. 11th ASPE Annual Meeting, Monterey, CA., Vol. 14, pp. 606-609.
11. Tanikella, B.V., & Scattergood, R.O., 1996, Controlled microcutting tests on single crystal silicon, Ibid, pp. 524-531.
12. Daniel, J., & Dornfeld, D., 1996, Inprocess detection of the ductile-brittle transition in high speed scratching of glass-Theory & Experiment, Ibid, pp. 561-565.