Deep-UV lithographic approaches for 1 Gb DRAM

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1997, Pages 127-128

  Wong, A ^a   Farrell, T ^a   Ferguson, R ^a   Lu, G ^a   Mansfield, S ^a   Molless, A ^a   Neisser, M ^a   Nunes, R ^a   Samuels, D ^a   Thomas, A ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MASKS; PHOTORESISTS; RANDOM ACCESS STORAGE;

ANNULAR ILLUMINATION METHOD; DYNAMIC RANDOM ACCESS MEMORY (DRAM); PHASE SHIFTING MASKS (PSM);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030719603     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/vlsit.1997.623731     Document Type: Conference Paper

References (9)