Visible luminescence in Si/SiO2 superlattices

Materials Research Society Symposium - Proceedings

Volumn 452, Issue , 1997, Pages 183-194

  Lockwood, D J ^a   Baribeau, J M ^a   Grant, P D ^a   Labbe, H J ^a   Lu, Z H ^a   Stapledon, J ^a   Sullivan, B T ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ETCHING TECHNIQUE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON MOLECULAR BEAM EPITAXY; VISIBLE LUMINESCENCE;

AMORPHOUS SILICON; ANNEALING; CATHODOLUMINESCENCE; CHEMICAL VAPOR DEPOSITION; LIGHT EMISSION; LIGHT INTERFERENCE; MAGNETRON SPUTTERING; MOLECULAR BEAM EPITAXY; PHOTOLUMINESCENCE; POROUS SILICON; SILICA; SILICON WAFERS;

SEMICONDUCTOR SUPERLATTICES;

EID: 0030719115     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (55)