Nitrogen as carrier gas for the growth of ZnSe and ZnSe : N in plasma enhanced metalorganic vapor phase epitaxy

Journal of Crystal Growth

Volumn 170, Issue 1-4, 1997, Pages 491-496

  Taudt, W ^a   Hardt, A ^a   Lampe, S ^a   Hamadeh, H ^a   Heuken, M ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; EPITAXIAL GROWTH; ORGANOMETALLICS; PHOTOLUMINESCENCE; PLASMA APPLICATIONS; SEMICONDUCTING SELENIUM COMPOUNDS; SEMICONDUCTING ZINC COMPOUNDS; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH;

PLASMA ENHANCED METALLORGANIC VAPOR PHASE EPITAXY;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0030718986     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(96)00594-5     Document Type: Article

References (18)

1. K. Wolf, H. Stanzl, A. Naumov, H.P. Wagner, W. Kuhn, B. Hahn and W. Gebhardt, J. Crystal Growth 138 (1994) 412.
2. W. Taudt, B. Wachtendorf, F. Sauerländer, H. Hamadeh, S. Lampe and M. Heuken, J. Electron. Mater. 24 (1995) 1671.
3. A. Kamata, H. Mitsuhashi and H. Fujita, Appl. Phys. Lett. 63 (1993) 3353.
4. K. Nishimura, Y. Nagao and K. Sakai, J. Crystal Growth 138 (1994) 114.
5. G. Sato, T. Numai, M. Hoshiyama, I. Suemune, H. Machida and N. Shimoyama, in: Ext. Abstr. of the 1995 Int. Conf. on Solid State Devices and Materials, Osaka (1995) p. 713.
6. M. Imaizumi, Y. Endoh, M. Suita, K. Ohtsuka, T. Isu, H. Namizaki and M. Nunoshita, J. Crystal Growth 159 (1996) 1167.
7. M. Imazumi, H. Kuroki, Y. Endoh, M. Suita, K. Ohtsuka, T. Isu and M. Nunoshita, J. Crystal Growth 159 (1996) 257.
8. W. Taudt, A. Schneider, J. Hermans, J. Geurts and M. Heuken, Adv. Mater. Opt. Electron. 3 (1994) 203.
9. A. Roth, in: Vacuum Technology (North-Holland, Amsterdam, 1976).
10. H. Hardtdegen, M. Hollfelder, R. Meyer, R. Carius, H. Münder, S. Frohnhoff and D. Szynka, J. Crystal Growth 124 (1992) 420.
11. M. Koppitz, O. Vestavik, W. Pletschen, A. Mircea, M. Heyen and W. Richter, J. Crystal Growth 68 (1984) 136.
12. J. Chen, Y. Zhang, B.J. Skromme, K. Akimoto and S.J. Pachuta, J. Appl. Phys. 78 (1995).
13. A.L. Gurskii, E.V. Lutsenko, I.I. Kulak, A.I. Mitkovets, G.P. Yablonskii, W. Taudt, H. Hamadeh and M. Heuken, in: Proc. of the Int. Symp. on Blue Laser and Light Emitting Diodes, March 5-7, Chiba, Japan (1996) p. 194.
14. J. Gutowski, N. Presser and G. Kudlek, Phys. Status Solidi (a) 120 (1990) 11.
15. A. Hoffmann, D. Wiesmann, E. Moll, V. Kutzer, B. Lummer, R. Heitz, I. Broser, W. Taudt, J. Söllner and M. Heuken, presented at the 7th Int. Conf. on II-VI Compunds and Devices, Edinburgh, UK (1995).
16. K.A. Prior, Phys. Status Solidi (b) 187 (1995) 379.
17. E. Kurtz, D. Albert, J. Kraus, D. Hommel and G. Landwehr, Int. Symp. on Blue Laser and Light Emitting Diodes, Chiba, Japan, March 5-7 (1996) p. 429.
18. P. Bäume, J. Gutowski, D. Wiesmann, R. Heitz, A. Hoffmann, E. Kurtz, D. Hommel and G. Landwehr, Appl. Phys. Lett. 67 (1995) 1914.