Vertically integrated media-isolated absolute pressure sensor

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1501-1504

  Goldman, Ken ^a   Gritt, George ^a   Baskett, Ira ^a   Sooriakumar, K ^a   Wallace, Dan ^a   Hughes, Don ^a   Shah, Mahesh ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; ELECTRONICS PACKAGING; FINITE ELEMENT METHOD; MICROMACHINING; PRESSURE; PRESSURE TRANSDUCERS; RESIDUAL STRESSES;

ABSOLUTE PRESSURE SENSOR; BULK MICROMACHINING; PIEZORESISTIVE TRANSDUCERS; THERMAL EXPANSION COEFFICIENT;

SENSORS;

EID: 0030718941     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)