X-ray diffraction and reflectivity studies of thin porous silicon layers

Materials Research Society Symposium - Proceedings

Volumn 452, Issue , 1997, Pages 437-442

  Buttard, D ^a   Dolino, G ^a   Bellet, D ^a   Baumbach, T ^a  

^a UNIV GRENOBLE ALPES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CRYSTAL STRUCTURE; INTERFACES (MATERIALS); LATTICE CONSTANTS; POROSITY; SIMULATION; SUBSTRATES; THIN FILMS; X RAY CRYSTALLOGRAPHY;

INTERFACE THICKNESS; REFLECTIVITY;

POROUS MATERIALS;

EID: 0030718878     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)