Photoelectrochemical etching of GaN

Materials Research Society Symposium - Proceedings

Volumn 468, Issue , 1997, Pages 349-354

  Youtsey, C ^a   Bulman, G ^a   Adesida, I ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; ETCHING; LIGHT; NITRIDES; OPTICS;

KOH SOLUTION; PHOTOELECTROCHEMICAL PROCESS;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0030718415     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-468-349     Document Type: Conference Paper

References (7)