Fabrication of micromechanical structures with a new electrodeless electrochemical etch stop

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 703-706

  Ashruf, C M A ^a   French, P J ^a   Sarro, P M ^a   Nagao, M ^a   Esashi, M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; ELECTROCHEMISTRY; ETCHING; GOLD; MATHEMATICAL MODELS; MICROMACHINING; PASSIVATION; SEMICONDUCTING SILICON;

ELECTROCHEMICAL CONTROLLED ETCHING (ECE);

MICROELECTROMECHANICAL DEVICES;

EID: 0030718287     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)