Low pressure encapsulated resonant structures excited electrostatically

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 101-104

  Corman, Thierry ^a   Enoksson, Peter ^a   Stemme, Goran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELECTROSTATICS; ENCAPSULATION; MATHEMATICAL MODELS; PRESSURE EFFECTS; Q FACTOR MEASUREMENT;

LOW PRESSURE ENCAPSULATED RESONANT STRUCTURES;

OPTICAL RESONATORS;

EID: 0030717926     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)