Investigation of interconnect capacitance characterization using charge-based capacitance measurement (CBCM) technique and 3-D simulation

Proceedings of the Custom Integrated Circuits Conference

Volumn , Issue , 1997, Pages 491-494

  Sylvester, Dennis ^a   Chen, James C ^a   Hu, Chenming ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; COMPUTER SIMULATION; ELECTRIC CURRENT MEASUREMENT; SUBSTRATES;

CHARGE BASED CAPACITANCE MEASUREMENT (CBCM) TECHNIQUE; PARASITIC INTERCONNECT CAPACITANCES;

INTEGRATED CIRCUIT TESTING;

EID: 0030716674     PISSN: 08865930     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)