Reference-length shortening by Kelvin voltage taps in linewidth test structures replicated in mono-crystalline silicon films

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1997, Pages 35-38

  Lee, William E ^a   Guthrie, William F ^a   Cresswell, Michael W ^a   Allen, Richard A ^a   Sniegowski, Jeffry J ^a   Linholm, Loren W ^a  

^a RENISHAW PLC   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL LATTICES; CRYSTAL ORIENTATION; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; SEMICONDUCTOR JUNCTIONS; THIN FILMS; VOLTAGE MEASUREMENT;

ELECTRICAL LINEWIDTH; KELVIN VOLTAGE TAPS;

SEMICONDUCTING FILMS;

EID: 0030716572     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)