High-average-power, high-repetition-rate, injection-seeded 213 nm generation for optical microlithography

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 11, Issue , 1997, Pages 511-512

  Kubota, S ^a   Masuda, H ^a   Kikuchi, H ^a   Oka, M ^a   Alexander, J ^a  

^a SONY CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BORATE MINERALS; CRYSTALS; ELECTROMAGNETIC DISPERSION; HARMONIC GENERATION; HIGH POWER LASERS; LASER BEAMS; LITHOGRAPHY; NUMERICAL ANALYSIS; OPTIMIZATION; Q SWITCHED LASERS;

BOYD ANALYSIS; CZOCHRALSKI GROWN BETA BARIUM BORATE; KLEINMAN ANALYSIS;

NEODYMIUM LASERS;

EID: 0030714322     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)