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Volumn 452, Issue , 1997, Pages 913-918
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Influence of nanocrystallinity on properties of photodiode and TFT image sensor structure
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL MICROSTRUCTURE;
CRYSTALLIZATION;
HYDROGEN;
IMAGE SENSORS;
MAGNETRON SPUTTERING;
PHOTODIODES;
RAMAN SCATTERING;
THIN FILM TRANSISTORS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY CRYSTALLOGRAPHY;
NANOCRYSTALLIZATION;
SMALL ANGLE X RAY DIFFRACTION;
AMORPHOUS SILICON;
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EID: 0030713703
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (9)
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