Model for the etch stop location on reversed biased pn junctions

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 715-716

  Lapadatu, Daniel ^a   Kittilsland, Gjermund ^a   Nese, Martin ^a   Nilsen, Svein M ^a   Jakobsen, Henrik ^a  

^a SensoNor Asa   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; ETCHING; SEMICONDUCTOR DEVICE MODELS; SILICON WAFERS;

ELECTROCHEMICAL ETCH STOP (ECES);

SEMICONDUCTOR JUNCTIONS;

EID: 0030713189     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)