Simulation of defect detection schemes for wafer inspection in VLSI manufacturing

International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

Volumn , Issue , 1997, Pages 145-148

  Swecker, Aaron ^a   Strojwas, Andrzej ^a   Li, Xiaolei ^a   Levy, Ady ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; DEFECTS; INTEGRATED CIRCUIT MANUFACTURE; MATHEMATICAL MODELS; MAXWELL EQUATIONS; OPTIMIZATION; THREE DIMENSIONAL;

LORENTZ GAUGE TRANSFORMATION; THREE DIMENSIONAL ELECTROMAGNETIC FIELD SIMULATOR; THREE DIMENSIONAL TOPOGRAPHY SIMULATOR;

VLSI CIRCUITS;

EID: 0030710924     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)