Threedimensionally structured transducers for chemical and biochemical sensors

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 481-484

  Conrath, N ^a   Czupor, N ^a   Steinkuhl, R ^a   Sundermeier, C ^a   Trau, D ^a   Wittkampf, M ^a   Hinkers, H ^a   Meusel, M ^a   Chemnitius, G ^a   Knoll, M ^a   Spener, F ^a   Cammann, K ^a  

^a ICB Institut fur Chemo und Biosensorik GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOLVED OXYGEN SENSORS; GLUCOSE SENSORS; INTEGRATED CIRCUIT MANUFACTURE; SILICON SENSORS;

MASS PRODUCTION;

TRANSDUCERS;

EID: 0030710304     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)