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Volumn , Issue , 1997, Pages 686-690
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Algorithms for coupled domain MEMS simulation
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Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
BOUNDARY ELEMENT METHOD;
COMPUTATIONAL METHODS;
COMPUTER SIMULATION;
ELECTROSTATICS;
FAST FOURIER TRANSFORMS;
INTEGRAL EQUATIONS;
ITERATIVE METHODS;
PARTIAL DIFFERENTIAL EQUATIONS;
THREE DIMENSIONAL;
MULTI LEVEL NEWTON METHODS;
NEWTON ITERATIVE METHODS;
NONLINEAR FORCE BALANCE EQUATION;
MICROELECTROMECHANICAL DEVICES;
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EID: 0030709794
PISSN: 0738100X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1145/266021.266321 Document Type: Conference Paper |
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Times cited : (2)
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References (12)
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