Piezoelectric force sensing Pb(Zr,Ti)O3 microcantilever array for multiprobe scanning force microscopy

Materials Research Society Symposium - Proceedings

Volumn 444, Issue , 1997, Pages 59-67

  Itoh, T ^a   Lee, C ^a   Chu, J ^a   Suga, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; DIELECTRIC PROPERTIES; ELECTRIC CURRENTS; MICROSCOPES; NATURAL FREQUENCIES; OXIDES; PIEZOELECTRIC MATERIALS; THIN FILMS;

MICROCANTILEVERS; MULTIPROBE SCANNING FORCE MICROSCOPY; PIEZOELECTRIC CONSTANTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030709761     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)