Dot-matrix electrical discharge machining for shaping fine structure

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 180-185

  Furutani, Katsushi ^a   Enami, Toshio ^a   Mohri, Naotake ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COATED WIRE ELECTRODES; MICROMETERS; MICROSTRUCTURE;

DOT MATRIX ELECTRICAL DISCHARGE MACHINING (EDM); FINE STRUCTURE SHAPER;

MICROMACHINING;

EID: 0030709189     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)