Accurate, cost effective absolute pressure sensor

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1493-1496

  Suzuki, Yoshitaka ^a   Kudo, Takahiro ^a   Ikeda, Kyoichi ^a  

^a YOKOGAWA ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; COSTS; ELECTRONICS PACKAGING; FRACTURE; PRESSURE; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; STRESSES; VACUUM APPLICATIONS;

PRESSURE SENSOR; SENSOR CHIP;

SILICON SENSORS;

EID: 0030708036     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)