Elimination of meshing noise in statistical TCAD

International Workshop on Statistical Metrology, Proceedings, IWSM

Volumn , Issue , 1997, Pages 106-109

  Axelrad, V ^a   Long, G ^a   Kuepper, P ^a  

^a PDF SOLUTIONS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CURRENT VOLTAGE CHARACTERISTICS; MASKS; STATISTICAL METHODS;

CONVENTIONAL MESHING; MESHING NOISE; PROCESS CONDITIONS; STATISTICAL SIMULATION;

COMPUTER AIDED DESIGN;

EID: 0030705594     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)