Sol-Gel Chemistry of Tantala HR Coatings: Structure and Laser-Damage Resistance

Journal of Sol-Gel Science and Technology

Volumn 8, Issue 1-3, 1997, Pages 493-497

  Sun, Y ^a   Vong, M S W ^b   Sermon, P A ^b  

^a INSTITUTE OF COAL CHEMISTRY   (China)

^b BRUNEL UNIVERSITY   (United Kingdom)

Author keywords

Optical coatings; Process effects; Sol gel method; Tantala

Indexed keywords

AMORPHOUS MATERIALS; CHELATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROLYSIS; LIGHT SCATTERING; OPTICAL COATINGS; REFRACTIVE INDEX; SOL-GELS; SOLS; THERMOGRAVIMETRIC ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ETHANOIC ACID; SPIN COATING; TANTALA;

TANTALUM COMPOUNDS;

EID: 0030705058     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02436888     Document Type: Article

References (14)

1. M. Saitoh, T. Mori, and H. Tamura, 1986 IEDM Techn. Dig. 698 (1986).
2. C.C. Wang, K.H. Zaininger, and M.T. Duffy, RCA Rev. 31, 723 (1970).
3. S. Zaima, T. Furuta, and Y. Yasuda, J. Electrochem. Soc. 137, 1297 (1990).
4. H.K. Pulker, Thin Films Science and Technology (Elsevier, 1984), vol. 6, p. 370.
5. P.J. Call, Materials Science and Technology, Polycrystalline and Amorphous Thin Films and Devices, edited by L.L. Kazmerski (Academic Press, New York, 1980), p. 257.
6. D. Milam, W.H. Lowdermilk, F. Rainer, J.E. Swain, C.K. Carniglia, and T.T. Hart, Applied Optics 21, 3689 (1982).
7. J.A. Britten and I.M. Thomas, Mat. Res. Soc. Symp. 271, 413 (1992).
8. I.M. Thomas, Appl. Opt. 28, 4013 (1989).
9. H.C. Ling, M.F. Yan, and W.W. Rhodes, Euro-Ceramic'89 1, 285 (1989).
10. Y. Sun, M.S.W. Vong, and P.A. Sermon, Thin Solid Films, 1996 (in press).
11. D.M. Spriggs and T.H. Bett, Laser-Induced Damage in Optical Materials, edited by H.E. Bennet, L.L. Chase, A.H. Guether, B.E. Newman, and M.J. Soileau, SPIE Proc., 2114, (1994); H.G. Floch and J.J. Priotton, Laser-Induced Damage in Optical Materials, edited by H.E. Bennet, L.L. Chase, A.H. Guether, B.E. Newman, and M.J. Soileau, SPIE Proc. 1438, 490, 136 (1989); M.S.W. Vong, P.A. Sermon, Y. Sun, and D.M. Spriggs, 1st Inter. ICF Conference (Monterey, USA, 1995).
12. D.M. Spriggs and T.H. Bett, Laser-Induced Damage in Optical Materials, edited by H.E. Bennet, L.L. Chase, A.H. Guether, B.E. Newman, and M.J. Soileau, SPIE Proc., 2114, (1994); H.G. Floch and J.J. Priotton, Laser-Induced Damage in Optical Materials, edited by H.E. Bennet, L.L. Chase, A.H. Guether, B.E. Newman, and M.J. Soileau, SPIE Proc. 1438, 490, 136 (1989); M.S.W. Vong, P.A. Sermon, Y. Sun, and D.M. Spriggs, 1st Inter. ICF Conference (Monterey, USA, 1995).
13. D.M. Spriggs and T.H. Bett, Laser-Induced Damage in Optical Materials, edited by H.E. Bennet, L.L. Chase, A.H. Guether, B.E. Newman, and M.J. Soileau, SPIE Proc., 2114, (1994); H.G. Floch and J.J. Priotton, Laser-Induced Damage in Optical Materials, edited by H.E. Bennet, L.L. Chase, A.H. Guether, B.E. Newman, and M.J. Soileau, SPIE Proc. 1438, 490, 136 (1989); M.S.W. Vong, P.A. Sermon, Y. Sun, and D.M. Spriggs, 1st Inter. ICF Conference (Monterey, USA, 1995).
14. S. Doeuff, M. Henry, C. Sanchez, and J. Livage, J. Non-Cryst. Solids 89, 206 (1987).