Energy funnels - a new oxide breakdown model

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1997, Pages 145-146

  Cheung, K P ^a   Colonell, J I ^a   Chang, C P ^a   Lai, W Y C ^a   Liu, C T ^a   Liu, R ^a   Pai, C S ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC BREAKDOWN OF SOLIDS; ELECTRON TUNNELING; LEAKAGE CURRENTS; OXIDES; THIN FILMS;

ANTENNA CAPACITORS; ENERGY FUNNEL; SOFT BREAKDOWN (SBD); STRESS INDUCED LEAKAGE CURRENT (SILC);

GATES (TRANSISTOR);

EID: 0030704858     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/vlsit.1997.623740     Document Type: Conference Paper

References (8)