High-Tc superconductor bolometer on a silicon nitride membrane

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 506-571

  Sanchez, S ^a   Elwenspoek, M ^a   Gui, C ^a   de Nivelle, M J M E ^a   de Vries, R ^a   de Korte, P A J ^a   Bruijn, M P ^a   Wijnbergen, J J ^a   Michalke, W ^a   Steinbeiss, E ^a   Heidenblut, T ^a   Schwierzi, B ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CHEMICAL POLISHING; FILM GROWTH; GADOLINIUM COMPOUNDS; HIGH TEMPERATURE SUPERCONDUCTORS; PHONONS; SEMICONDUCTOR DEVICE MODELS; SILICON NITRIDE; SPURIOUS SIGNAL NOISE; SUPERCONDUCTING FILMS; THERMAL CONDUCTIVITY OF SOLIDS;

NOISE EQUIVALENT POWER (NEP);

BOLOMETERS;

EID: 0030703012     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)