Spectroscopic ellipsometry study of HgCdTe epilayer surfaces during electron cyclotron resonance plasma etching

Materials Research Society Symposium - Proceedings

Volumn 450, Issue , 1997, Pages 293-300

  Johnson, J N ^a   Dinan, J H ^a   Singley, K M ^a   Martinka, M ^a   Johs, B ^a  

^a Night Vision and Electronic Sensors   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELECTRON CYCLOTRON RESONANCE; ELLIPSOMETRY; PLASMA ETCHING; SEMICONDUCTOR DEVICE MODELS; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

MERCURY CADMIUM TELLURIDE; SPECTROSCOPIC ELLIPSOMETRY (SE);

SEMICONDUCTING CADMIUM COMPOUNDS;

EID: 0030702226     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)