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Volumn 446, Issue , 1997, Pages 369-376
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Structural characterization of different insulating films by spectroscopic ellipsometry and grazing X-ray reflectance
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
ANTIREFLECTION COATINGS;
ELLIPSOMETRY;
INFRARED RADIATION;
INSULATING MATERIALS;
LITHOGRAPHY;
REFRACTIVE INDEX;
SPECTROSCOPIC ANALYSIS;
TRANSPARENCY;
ULTRAVIOLET RADIATION;
X RAY ANALYSIS;
GRAZING X RAY REFLECTANCE;
INSULATING FILMS;
SPECTROSCOPIC ELLIPSOMETRY;
THIN FILMS;
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EID: 0030701457
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (7)
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References (11)
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