High sensitivity and temperature tolerant microelectronic O2 gas sensor

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 979-982

  Gurbuz, Y ^a   Kang, W P ^a   Davidson, J L ^a   Kerns, D V ^a   Henderson, B ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON MONOXIDE; CHEMICAL VAPOR DEPOSITION; FABRICATION; SUBSTRATES; TEMPERATURE; THERMAL CONDUCTIVITY;

CHEMICAL INERTNESS; ELECTRICAL STABILITY; MICROELECTRONIC GAS SENSOR;

OXYGEN SENSORS;

EID: 0030699803     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)