Fabrication of semiconductor nanostructure arrays on a silicon substrate using an anodized aluminum template

Materials Research Society Symposium - Proceedings

Volumn 452, Issue , 1997, Pages 299-303

  McGinnis, S P ^a   Cleary, J N ^a   Das, B ^a  

^a WEST VIRGINIA UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ANODIC OXIDATION; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON; SYNTHESIS (CHEMICAL); THIN FILMS;

PORE FORMATION; SEMICONDUCTOR NANOSTRUCTURE ARRAY; SILICON BASED X RAY DETECTOR;

NANOTECHNOLOGY;

EID: 0030699722     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)