Artificial neural network based detection and diagnosis of plasma-etch faults

Journal of Intelligent Systems

Volumn 7, Issue 1-2, 1997, Pages 57-81

  Baluja, Shumeet ^a   Maxion, Roy A ^a  

^a Carnegie Mellon University   (United States)

Author keywords

Artificial neural networks; Fault detection; Fault diagnosis; Plasma etch; Prediction; Selective attention

Indexed keywords

FAILURE ANALYSIS; PATTERN RECOGNITION; PLASMA ETCHING; SEMICONDUCTOR DEVICE MANUFACTURE;

PLASMA ETCH FAULTS;

NEURAL NETWORKS;

EID: 0030698888     PISSN: 03341860     EISSN: None     Source Type: Journal    
DOI: 10.1515/JISYS.1997.7.1-2.57     Document Type: Article

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