MOVPE GaN gas-phase chemistry for reactor design and optimization

Materials Research Society Symposium - Proceedings

Volumn 449, Issue , 1997, Pages 101-106

  Safvi, S A ^a   Redwing, J M ^a   Thon, A ^a   Flynn, J S ^a   Tischler, M A ^a   Kuech, T F ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTORS; DECOMPOSITION; MIXING; NITRIDES; SEMICONDUCTING GALLIUM COMPOUNDS;

FLOW TUBE REACTORS; GALLIUM NITRIDE; OLIGOMERIZATION;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0030697686     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)