Ohmic contact to n-GaN with TiN diffusion barrier

Materials Research Society Symposium - Proceedings

Volumn 449, Issue , 1997, Pages 1055-1060

  Kaminska, E ^a   Piotrowska, A ^a   Guziewicz, M ^a   Kasjaniuk, S ^a   Barcz, A ^a   Dynowska, E ^a   Bremser, M D ^a   Nam, O H ^a   Davis, R F ^a  

^a Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; PHASE INTERFACES; PHASE TRANSITIONS; SEMICONDUCTING GALLIUM COMPOUNDS; TITANIUM; TITANIUM NITRIDE;

NITRIDE SEMICONDUCTORS; THERMALLY INDUCED PHASE TRANSITION;

OHMIC CONTACTS;

EID: 0030697046     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)