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Volumn 446, Issue , 1997, Pages 285-290
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Growth of transparent SiO2 thin film on silicon at room temperature by using 172 nm Xe2* excimer lamp
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC INSULATORS;
ELECTRIC RESISTANCE;
EXCIMER LASERS;
FILM GROWTH;
OXIDATION;
PERMITTIVITY;
PHOTOCHEMICAL REACTIONS;
REFRACTIVE INDEX;
SEMICONDUCTING SILICON;
SILICA;
SUBSTRATES;
TRANSPARENCY;
NITROGEN FLUORIDE;
THIN FILMS;
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EID: 0030695787
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (6)
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References (10)
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