Low temperature synthesis of plasma TEOS SiO2

Materials Research Society Symposium - Proceedings

Volumn 446, Issue , 1997, Pages 255-259

  Itani, T ^a   Fukuyama, S ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONDENSATION REACTIONS; DEPOSITION; ELECTRIC EXCITATION; IONS; LOW TEMPERATURE EFFECTS; MOLECULAR STRUCTURE; PLASMA APPLICATIONS; REACTION KINETICS; SILANES; SUBSTRATES; SYNTHESIS (CHEMICAL);

TETRAETHOXY SILANES;

SILICA;

EID: 0030695786     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)