SCOPUS 정보 검색 플랫폼

Materials Science Forum

Volumn 248-249, Issue , 1997, Pages 289-292

On the amorphization of the Si/Ge superlattices upon ion bombardment

(8) Sobolev, N A a,b Gartner, K b Kaiser, U b Konig, U c Presting, H c Weber, B b Wendler, E b Wesch, W b

a INSTITUTE OF SOLID STATE AND SEMICONDUCTOR PHYSICS (Belarus)

b FRIEDRICH SCHILLER UNIVERSITY JENA (Germany)

c DAIMLER AG (Germany)

Author keywords

Amorphization; Germanium; Ion Implantation; Silicon; Superlattice

Indexed keywords

AMORPHIZATION; ION BOMBARDMENT; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING GERMANIUM; SEMICONDUCTOR SUPERLATTICES; TRANSMISSION ELECTRON MICROSCOPY;

CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY (XTEM);

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0030693531 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: None Document Type: Article

Times cited : (6)

References (10)

1
- 36449001979
- D. J. Eaglesham, J. M. Poate, D C. Jacobson, M. Cerullo, L. N. Pfeiffer, and K. West, Appl. Phys. Lett. 68, 523 (1991)
- (1991) Appl. Phys. Lett. , vol.68 , pp. 523
- Eaglesham, D.J.¹ Poate, J.M.² Jacobson, D.C.³ Cerullo, M.⁴ Pfeiffer, L.N.⁵ West, K.⁶

2
- 0004825675
- M. Vos, C. Wu, I. V. Mitchell, T. E. Jackman, J.-M. Baribeau, and J. McCaffrey, Appl. Phys. Lett. 58, 951 (1991)
- (1991) Appl. Phys. Lett. , vol.58 , pp. 951
- Vos, M.¹ Wu, C.² Mitchell, I.V.³ Jackman, T.E.⁴ Baribeau, J.-M.⁵ McCaffrey, J.⁶

3
- 0001448445
- U. Menczigar, G. Abstreiter, J. Olajos, H. Grimmeis, H. Kibbel, H. Presting, and E. Kasper, Phys. Rev. B 47, 4099 (1993)
- (1993) Phys. Rev. B , vol.47 , pp. 4099
- Menczigar, U.¹ Abstreiter, G.² Olajos, J.³ Grimmeis, H.⁴ Kibbel, H.⁵ Presting, H.⁶ Kasper, E.⁷

4
- 4143059764
- H. Presting, U Menczigar, and H. Kibbel, J. Vac Sci. Technol. B 11, 1110 (1993)
- (1110) J. Vac Sci. Technol. B , vol.11 , pp. 1993
- Presting, H.¹ Menczigar, U.² Kibbel, H.³

5
- 0004830321
- W. Jager, D. Stenkamp, P. Ehrhart, K. Leifer, W. Sybertz, H. Kibbel, H. Presting, and E. Kasper, Thin Solid Films 222, 221 (1992)
- (1992) Thin Solid Films , vol.222 , pp. 221
- Jager, W.¹ Stenkamp, D.² Ehrhart, P.³ Leifer, K.⁴ Sybertz, W.⁵ Kibbel, H.⁶ Presting, H.⁷ Kasper, E.⁸

6
- 0040851711
- T. P. Sjoreen, O. W. Holland, M. K. El-Chor, and C. W. White, Mater. Res. Soc. 128, 593 (1989)
- (1989) Mater. Res. Soc. , vol.128 , pp. 593
- Sjoreen, T.P.¹ Holland, O.W.² El-Chor, M.K.³ White, C.W.⁴

7
- 0004829003
- T. E. Haynes and O. W. Holland, Appl. Phys. Lett. 61, 61 (1992)
- (1992) Appl. Phys. Lett. , vol.61 , pp. 61
- Haynes, T.E.¹ Holland, O.W.²

8
- 0010721891
- D. Y. C. Lie, A. Vantomme, F. Eisen, T. Vreeland, M.-A. Nicolet, T. K. Cams, V. Arbet-Engels, and K.-L. Wang, J. Appl. Phys. 74, 6039 (1993)
- (1993) J. Appl. Phys. , vol.74 , pp. 6039
- Lie, D.Y.C.¹ Vantomme, A.² Eisen, F.³ Vreeland, T.⁴ Nicolet, M.-A.⁵ Cams, T.K.⁶ Arbet-Engels, V.⁷ Wang, K.-L.⁸

9
- 84902954732
- J. F. Gibbons, Proc. IEEE 56, 295 (1968); 60, 1062 (1972)
- (1968) Proc. IEEE , vol.56 , pp. 295
- Gibbons, J.F.¹

10
- 0346003810
- J. F. Gibbons, Proc. IEEE 56, 295 (1968); 60, 1062 (1972)
- (1972) Proc. IEEE , vol.60 , pp. 1062

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.