Internal model control approach to run-to-run control for semiconductor manufacturing

Proceedings of the American Control Conference

Volumn 1, Issue , 1997, Pages 145-149

  Adivikolanu, Sudhakar ^a   Zafiriou, Evanghelos ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEM SYNTHESIS; FEEDBACK CONTROL; ROBUSTNESS (CONTROL SYSTEMS); SEMICONDUCTOR DEVICE MANUFACTURE;

RESPONSE SURFACE MODELS (RSM); RUN TO RUN CONTROLLERS (RTR);

PROCESS CONTROL;

EID: 0030692907     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/acc.1997.611772     Document Type: Conference Paper

References (10)