Novel wide-band-gap semiconductor based microelectronic gas sensor

Annual Device Research Conference Digest

Volumn , Issue , 1997, Pages 44-45

  Gurbuz, Y ^a   Kang, W P ^a   Davidson, J L ^a   Kerns, D V ^a   Henderson, B ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; CHEMICAL VAPOR DEPOSITION; HIGH TEMPERATURE OPERATIONS; MICROELECTRONICS; PLASMA APPLICATIONS; SEMICONDUCTING DIAMONDS; SEMICONDUCTOR DEVICE MANUFACTURE; SYNTHETIC DIAMONDS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); SPACE CHARGE LIMITED CURRENT (SCLC);

CHEMICAL SENSORS;

EID: 0030691633     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)