Design, analysis and testing of a linear/theta motor for semiconductor applications

Proceedings of the International Conference on Power Electronics and Drive Systems

Volumn 1, Issue , 1997, Pages 357-364

  Widdowson, G P ^a   Kuah, T H ^a   YouYong, L ^a   Vath III, Charles J ^a  

^a ASM Technology Singapore Pte Ltd   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC COILS; ELECTRIC MACHINERY TESTING; FINITE ELEMENT METHOD; INTEGRATED CIRCUITS; LUMPED PARAMETER NETWORKS; MACHINE DESIGN; MAGNETIC CIRCUITS; MAGNETOSTATICS; MATHEMATICAL MODELS; OPTIMIZATION; ROTATING MACHINERY;

ALUMINUM WEDGE WIRE BONDS; LINEAR VOICE COIL MOTORS;

LINEAR MOTORS;

EID: 0030689465     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)