Mechanical and dielectric properties of low permittivity dielectric materials

Materials Research Society Symposium - Proceedings

Volumn 443, Issue , 1997, Pages 79-84

  Alptekin, A ^a   Czeremuszkin, G ^a   Martinu, L ^a   Meunier, M ^a   Sacher, E ^a   DiRenzo, M ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANNEALING; COPPER; DIELECTRIC PROPERTIES OF SOLIDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PERMITTIVITY; PLASMA APPLICATIONS; POLYTETRAFLUOROETHYLENES; SPUTTER DEPOSITION; SURFACE TENSION; VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

PEEL TESTS; SCRATCH TESTS;

DIELECTRIC MATERIALS;

EID: 0030689308     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)