Water use efficiency in immersion wafer rinsing

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 527-532

  Roche, Thomas S ^a   Peterson, Thomas W ^a   Hansen, Eric ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL CLEANING; SURFACE CLEANING; WATER;

IMMERSION RINSING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030688561     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)