Formation of water marks on both hydrophilic and hydrophobic wafers

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 513-518

  Park, Jin Goo ^a   Han, Jeung Hoon ^a   Kim, Seung Hwan ^a   Lee, Sang Ho ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; DRYING; NITROGEN; OXIDATION; OXYGEN; PARTICLES (PARTICULATE MATTER); SUBSTRATES; WATER; WETTING;

AUGER ANALYSIS; WATER MARKS FORMATION;

SILICON WAFERS;

EID: 0030688560     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)