Structure and mechanical properties of titanium nitride, zirconium nitride, and chromium nitride films by reactive magnetron-sputter deposition

Materials Research Society Symposium - Proceedings

Volumn 458, Issue , 1997, Pages 379-384

  Soe, W H ^a   Kitagaki, T ^a   Ueda, H ^a   Shima, N ^a   Otsuka, M ^a   Yamamoto, R ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOYS; CHROMIUM COMPOUNDS; ELASTIC MODULI; FILM GROWTH; HARDNESS; SPUTTER DEPOSITION; SUBSTRATES; TITANIUM NITRIDE; ZIRCONIUM COMPOUNDS;

CHROMIUM NITRIDE; HARD ALLOY; NANOINDENTATION TEST; REACTIVE MAGNETRON DEPOSITION; ZIRCONIUM NITRIDE;

THIN FILMS;

EID: 0030687028     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)