Integrated microchannels with metallic and polymeric channel sections

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 519-522

  Hunt Holmes, Jennifer L ^a   Frazier, A Bruno ^a   Swerdlow, Harold ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABS RESINS; ACRYLICS; MICROMACHINING; POLYCARBONATES; POLYIMIDES; POLYSTYRENES; POLYVINYL CHLORIDES; SUBSTRATES;

METALLIC CHANNELS; POLYMERIC CHANNELS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030685409     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)