Infrared spectroscopy of covalently bonded species on silicon surfaces: Deuterium, chlorine, and cobalt tetracarbonyl

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 415-420

  Luo, Huihong ^a   Chidsey, Christopher E D ^a   Chabal, Yves ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CHLORINE; COBALT COMPOUNDS; DEUTERIUM; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; WATER;

ATTENUATION TOTAL REFLECTION (ATR); COBALT TETRACARBONYL;

SEMICONDUCTING SILICON;

EID: 0030685314     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)