Correlation of electrical and physical properties of SIMOX BOX affected by various implantation parameters

Materials Research Society Symposium - Proceedings

Volumn 446, Issue , 1997, Pages 193-198

  Yoon, J U ^a   Kim, G N ^a   Krska, J H Y ^a   Chung, J E ^a   Allen, L P ^a   Goodson, K ^a   Kaeding, O ^a   Nauka, K ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; HIGH TEMPERATURE EFFECTS; INTERFACES (MATERIALS); ION IMPLANTATION; PHOTOVOLTAIC EFFECTS; SUBSTRATES; SURFACE ROUGHNESS; THERMAL CONDUCTIVITY OF SOLIDS; VOLTAGE MEASUREMENT;

BEAM CURRENTS; HIGH FIELD CONDUCTION; SEPARATION BY IMPLANTATION OF OXYGEN (SIMOX);

SILICON ON INSULATOR TECHNOLOGY;

EID: 0030683433     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)