Pulsed laser assisted particulate cleaning of solid surfaces

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 475-479

  Kumar, D ^a   Ivory, S ^a   Mahajan, U ^a   Singh, Rajiv K ^a  

^a UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; PARTICLES (PARTICULATE MATTER); PULSED LASER APPLICATIONS; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACE CLEANING;

PARTICULATE REMOVAL EFFICIENCY;

SILICON WAFERS;

EID: 0030683279     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)