Analytical modeling of squeeze-film damping in accelerometers

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1117-1120

  Bourgeois, C ^a   Porret, F ^a   Hoogerwerf, A ^a  

^a CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ESTIMATION; GASES; MATHEMATICAL MODELS; NATURAL FREQUENCIES; NAVIER STOKES EQUATIONS; PRESSURE; SILICON SENSORS; THIN FILMS; VISCOSITY;

CAPACITIVE ACCELEROMETER; MICROSENSORS; SQUEEZE FILM;

ACCELEROMETERS;

EID: 0030681583     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)