Surface micromachined latching accelerometer

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1189-1192

  Sun, Xi Qing ^a   Zhou, Shifang ^a   Carr, William N ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; CMOS INTEGRATED CIRCUITS; MICROMACHINING; SENSITIVITY ANALYSIS; SENSORS; SURFACES;

BEAM MASS INDUCED UNIFORMLY DISTRIBUTED LOAD; CENTER MASS INDUCED LOAD FORCE; MECHANICAL SENSOR; SURFACE MICROMACHINED LATCHING ACCELEROMETER;

ACCELEROMETERS;

EID: 0030681578     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)