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Volumn , Issue 1, 1997, Pages 100-105
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Automatic scanning microellipsometer
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
AUTOMATION;
LASER APPLICATIONS;
LIGHT;
OPTICAL SYSTEMS;
OPTICS;
SCANNING;
LASER MICROSOUND;
MICROELLIPSOMETER;
ELLIPSOMETRY;
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EID: 0030681177
PISSN: 03207102
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (3)
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References (5)
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